Patent Assignment
Reel/Frame 046572/0162
Assignment of Assignor's Interest
Recorded: 2018-08-07
Pages: 8
Assignors
SPYROPOULOS, EVANGELOS T.
Executed: 2018-08-06
AGARWAL, PIYUSH
Executed: 2018-06-29
LEUNG, JAMES
Executed: 2018-07-02
HASHEMI GHERMEZI, SEYED HOSSEIN
Executed: 2018-06-29
SHAREEF, IQBAL A.
Executed: 2018-08-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Hybrid Flow Metrology for Improved Chamber Matching