Patent Assignment
Reel/Frame 046585/0712
Assignment of Assignor's Interest
Recorded: 2018-08-08
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Progressive Heating of Components of Substrate Processing Systems Using Tcr Element-Based Heaters