Patent Assignment
Reel/Frame 046591/0956
Assignment of Assignor's Interest
Recorded: 2018-07-19
Pages: 5
Assignors
HAYASHI, MASATO
Executed: 2018-07-06
NOGUCHI, KOHEI
Executed: 2018-07-06
KAJIWARA, DAISUKE
Executed: 2018-07-06
HIGASHI, KOUDAI
Executed: 2018-07-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Foreign Substance Detection Device and Foreign Substance Detection Method