Patent Assignment
Reel/Frame 046597/0848
Assignment of Assignor's Interest
Recorded: 2018-08-09
Pages: 6
Assignors
OKAMOTO, YOSHIKI
Executed: 2018-08-07
TAKIGUCHI, YASUSHI
Executed: 2018-08-07
KUBO, AKIHIRO
Executed: 2018-08-07
HOSAKA, HAYATO
Executed: 2018-08-07
OZASA, RYUTO
Executed: 2018-08-07
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Dressing Apparatus and Dressing Method for Substrate Rear Surface Polishing Member