Patent Assignment
Reel/Frame 046607/0321
Assignment of Assignor's Interest
Recorded: 2018-07-23
Pages: 5
Assignors
HU, CHENG-KANG
Executed: 2018-06-19
KUO, SHOU-WEN
Executed: 2018-06-20
CHUANG, SHENG-HSIANG
Executed: 2018-06-19
PAI, JIUN-RONG
Executed: 2018-06-19
LIU, HSU-SHUI
Executed: 2018-06-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Apparatus and Method for Inspecting Wafer Carriers