Patent Assignment
Reel/Frame 046615/0507
Assignment of Assignor's Interest
Recorded: 2018-08-10
Pages: 5
Assignors
HUANG, JIEH-CHAU
Executed: 2018-07-10
YEN, BI-MING
Executed: 2018-07-13
HU, HUNG-LUNG
Executed: 2018-07-12
HSIA, YING TING
Executed: 2018-07-12
HUANG, PING-JUNG
Executed: 2018-07-13
HSIA, PEI YEN
Executed: 2018-07-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD., HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Wafer Cleaning Apparatus and Method