Patent Assignment
Reel/Frame 046657/0408
Assignment of Assignor's Interest
Recorded: 2018-08-22
Pages: 11
Assignors
SEITZ, HOLGER
Executed: 2018-07-20
BUTTGEREIT, UTE
Executed: 2018-07-20
THALER, THOMAS
Executed: 2018-07-20
FRANK, THOMAS
Executed: 2018-07-20
MATEJKA, ULRICH
Executed: 2018-08-17
DEGUENTHER, MARKUS
Executed: 2018-07-17
BIRKNER, ROBERT
Executed: 2018-08-16
GRAU, DOMINIK
Executed: 2018-08-16
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Device for Characterizing a Mask for Microlithography