Patent Assignment
Reel/Frame 046663/0050
Assignment of Assignor's Interest
Recorded: 2018-08-22
Pages: 7
Assignors
SATO, MASANORI
Executed: 2018-08-21
KASHIMURA, RYUSEI
Executed: 2018-08-21
TSUNAMOTO, TETSU
Executed: 2018-08-21
OSAKI, YOSHINORI
Executed: 2018-08-21
ARAKANE, TOSHIYUKI
Executed: 2018-08-21
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Measuring Device, Measurement Method, and Plasma Processing Device