Measuring device, measurement method, and plasma processing device
A measuring device includes a switch that switches a connection of an electrode to which a direct current voltage is applied, wherein the electrode is within an electrostatic chuck disposed in a plasma processing device; a component provided with electrostatic capacitance, wherein the component is connected to the switch; and a measuring unit that measures a value corresponding to an electric charge amount accumulated in the component provided with the electrostatic capacitance.
1. A measuring device comprising:
a switch that switches a connection of an electrode to which a direct current voltage is applied, wherein the electrode is within an electrostatic chuck disposed in a plasma processing device;
a component provided with electrostatic capacitance, wherein the component is connected to the switch; and
a measuring unit that measures a value corresponding to an electric charge amount accumulated in the component provided with the electrostatic capacitance,
wherein, during execution of substrate processing by plasma, the switch switches the connection of the electrode to the component provided with the electrostatic capacitance, and
wherein, during the execution of the substrate processing, the measuring unit measures the value corresponding to the electric charge amount accumulated in the component provided with the electrostatic capacitance.
2. The measuring device according to claim 1 , wherein the switch is for switching the connection of the electrode between a direct-current power supply and the component provided with the electrostatic capacitance.
3. The measuring device according to claim 1 , further comprising:
a filter that removes the high frequency electric power,
wherein the filter is disposed between the switch and the component provided with the electrostatic capacitance.
4. The measuring device according to claim 1 , wherein, during execution of a cleaning process, the switch switches the connection of the electrode to the component provided with the electrostatic capacitance, and
wherein, during the execution of the cleaning process, the measuring unit measures the value corresponding to the electric charge amount accumulated in the component provided with the electrostatic capacitance.
5. The measuring device according to claim 1 , wherein, after the switch switches the connection of the electrode to the component provided with the electrostatic capacitance, a high frequency power source applies the high frequency electric power.
6. The measuring device according to claim 1 , wherein the measuring device measures a self bias voltage of plasma based on the measured value corresponding to the electric charge amount.
7. The measuring device according to claim 1 , wherein the measuring unit is provided with a probe installed on a surface of the component provided with the electrostatic capacitance, wherein the probe contacts the surface or probe does not contact the surface, and
wherein the component provided with the electrostatic capacitance and the probe are installed inside a vacuum container.