Patent Assignment
Reel/Frame 046674/0124
Assignment of Assignor's Interest
Recorded: 2018-08-23
Pages: 3
Assignors
LIAO, SHU LING
Executed: 2018-08-10
KO, CHUNG-CHI
Executed: 2018-08-10
KAO, WAN-YI
Executed: 2018-08-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Varying Temperature Anneal for Film and Structures Formed Thereby