Patent Assignment
Reel/Frame 046677/0017
Assignment of Assignor's Interest
Recorded: 2018-08-23
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Overlay-Shift Measurement System and Method for Manufacturing Semiconductor Structure and Measuring Alignment Mark of Semiconductor Structure