Patent Assignment
Reel/Frame 046683/0332
Assignment of Assignor's Interest
Recorded: 2018-08-23
Pages: 4
Assignors
LAJEVARDI, BEHZAD
Executed: 2018-08-21
KU, WILLIE
Executed: 2018-08-21
TRINH, TOM
Executed: 2018-08-21
CHAN, HENRY
Executed: 2018-08-22
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Extracting Real-Time Data from Ethercat Sensor Bus in a Substrate Processing System