Patent Assignment
Reel/Frame 046695/0437
Assignment of Assignor's Interest
Recorded: 2018-08-24
Pages: 3
Assignors
TABATA, MASAHIRO
Executed: 2018-08-06
HISAMATSU, TORU
Executed: 2018-08-06
KIHARA, YOSHIHIDE
Executed: 2018-08-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Workpiece Processing Method