Patent Assignment
Reel/Frame 046729/0661
Assignment of Assignor's Interest
Recorded: 2018-08-28
Pages: 4
Assignors
FAGGINGER AUER, BASTIAAN ONNE
Executed: 2017-09-11
HINNEN, PAUL CHRISTIAAN
Executed: 2017-09-14
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2017-09-11
TSIATMAS, ANAGNOSTIS
Executed: 2017-09-11
MEDVEDYEVA, MARIYA VYACHESLAVIVNA
Executed: 2017-09-11
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Beat Patterns for Alignment on Small Metrology Targets