Patent Assignment
Reel/Frame 046772/0049
Assignment of Assignor's Interest
Recorded: 2018-09-01
Pages: 5
Assignors
CHANG, CHENG-WEI
Executed: 2018-05-15
LIN, KAO-FENG
Executed: 2018-05-15
HUNG, MIN-HSIU
Executed: 2018-05-15
CHAO, YI-HSIANG
Executed: 2018-05-15
HUANG, HUANG-YI
Executed: 2018-05-15
LIN, YU-TING
Executed: 2018-05-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Selective Formation of Titanium Silicide and Titanium Nitride by Hydrogen Gas Control