Patent Assignment
Reel/Frame 046777/0333
Assignment of Assignor's Interest
Recorded: 2018-09-04
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Assembly Provided with Coolant Flow Channel, Method of Controlling Assembly Provided with Coolant Flow Channel, and Substrate Processing Apparatus