Patent Assignment
Reel/Frame 046782/0436
Assignment of Assignor's Interest
Recorded: 2018-08-14
Pages: 2
Assignee
SPTS TECHNOLOGIES LIMITED
COED RHEDYN, RINGLAND WAY, NEWPORT, NP18 2TA, UNITED KINGDOM
Covered Property
(1)
Method and Apparatus for Dry Gas Phase Chemically Etching a Structure