Patent Assignment
Reel/Frame 046790/0249
Assignment of Assignor's Interest
Recorded: 2018-09-05
Pages: 9
Assignors
MARCIANO, TAL
Executed: 2018-08-22
GUTMAN, NADAV
Executed: 2018-07-17
PASKOVER, YURI
Executed: 2018-08-22
COHEN, GUY
Executed: 2018-09-04
LEVINSKI, VLADIMIR
Executed: 2018-07-19
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DR., MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Estimating Amplitude and Phase Asymmetry in Imaging Technology for Achieving High Accuracy in Overlay Metrology