Patent Assignment
Reel/Frame 046800/0904
Assignment of Assignor's Interest
Recorded: 2018-09-06
Pages: 4
Assignors
CHANG, CHING-YU
Executed: 2018-08-28
SHIU, JUNG-HAU
Executed: 2018-08-28
WANG, WEI-REN
Executed: 2018-08-28
PAN, SHING-CHYANG
Executed: 2018-08-28
LEE, TZE-LIANG
Executed: 2018-08-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Morphology of Resist Mask Prior to Etching