Patent Assignment
Reel/Frame 046808/0100
Assignment of Assignor's Interest
Recorded: 2018-09-06
Pages: 5
Assignor
ISHIBASHI, TOMOATSU
Executed: 2018-08-07
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus, Substrate Cleaning Method, Substrate Processing Apparatus, and Substrate Drying Apparatus