Patent Assignment
Reel/Frame 046814/0727
Assignment of Assignor's Interest
Recorded: 2018-09-07
Pages: 5
Assignors
TSUCHIYA, TAKAFUMI
Executed: 2018-08-18
ISHII, YUKI
Executed: 2018-08-18
MASUTOMI, HIROYUKI
Executed: 2018-09-03
FUJITSU, SEIGO
Executed: 2018-09-03
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method and Recording Medium