Patent Assignment
Reel/Frame 046850/0337
Assignment of Assignor's Interest
Recorded: 2018-09-12
Pages: 4
Assignors
CHENG, KANGGUO
Executed: 2017-03-09
MIAO, XIN
Executed: 2017-03-09
XU, WENYU
Executed: 2017-03-09
ZHANG, CHEN
Executed: 2017-03-09
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Field Effect Transistor Air-Gap Spacers with an Etch-Stop Layer