Patent Assignment
Reel/Frame 046851/0099
Assignment of Assignor's Interest
Recorded: 2018-09-12
Pages: 6
Assignors
SEITZ, HOLGER
Executed: 2018-08-17
ZEUNER, THOMAS
Executed: 2018-08-20
FELDMANN, HEIKO
Executed: 2018-08-01
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Inspection Device for Masks for Semiconductor Lithography and Method