Patent Assignment
Reel/Frame 046862/0392
Assignment of Assignor's Interest
Recorded: 2018-09-13
Pages: 6
Assignors
MATSUYAMA, SHOICHIRO
Executed: 2018-09-05
SATOH, DAIKI
Executed: 2018-09-06
SASAKI, YASUHARU
Executed: 2018-09-06
NISHIJIMA, TAKASHI
Executed: 2018-09-06
PARK, JINYOUNG
Executed: 2018-09-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method