Patent Assignment
Reel/Frame 046889/0925
Assignment of Assignor's Interest
Recorded: 2018-09-17
Pages: 5
Assignors
PARK, JIHO
Executed: 2018-08-08
PARK, JEONGHEE
Executed: 2018-08-08
PARK, CHANGYUP
Executed: 2018-08-08
Assignee
SAMSUNG ELECTRONICS CO., LTD
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Collimator, Fabrication Apparatus Including the Same, and Method of Fabricating a Semiconductor Device Using the Same