Patent Assignment
Reel/Frame 046891/0392
Assignment of Assignor's Interest
Recorded: 2018-09-17
Pages: 5
Assignors
HSIEH, KEN-HSIEN
Executed: 2016-05-16
LAI, CHIH-MING
Executed: 2016-05-16
LIU, RU-GUN
Executed: 2016-05-16
HUANG, WEN-CHUN
Executed: 2016-05-16
CHENG, WEN-LI
Executed: 2016-05-16
WANG, PAI-WEI
Executed: 2016-05-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Multiple Patterning Method for Semiconductor Devices