Patent Assignment
Reel/Frame 046897/0882
Assignment of Assignor's Interest
Recorded: 2018-09-18
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Remote Plasma Based Deposition of Boron Nitride, Boron Carbide, and Boron Carbonitride Films