Patent Assignment
Reel/Frame 046908/0616
Assignment of Assignor's Interest
Recorded: 2018-09-19
Pages: 3
Assignors
KIHARA, YOSHIHIDE
Executed: 2018-07-27
HISAMATSU, TORU
Executed: 2018-07-27
HONDA, MASANOBU
Executed: 2018-07-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Processing Target Object