Patent Assignment
Reel/Frame 046914/0391
Assignment of Assignor's Interest
Recorded: 2018-09-19
Pages: 3
Assignors
WEIMER, MATTHEW SCOTT
Executed: 2018-07-19
VARADARAJAN, BHADRI N.
Executed: 2018-07-19
GONG, BO
Executed: 2018-07-19
GUI, ZHE
Executed: 2018-07-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Conformal Deposition of Silicon Carbide Films Using Heterogeneous Precursor Interaction
Application:
16/044,357 →
Publication:
US 2018/0347035