Patent Assignment
Reel/Frame 046941/0440
Assignment of Assignor's Interest
Recorded: 2018-09-21
Pages: 4
Assignors
TEL, WIM TJIBBO
Executed: 2016-06-03
DEPRE, LAURENT MICHEL MARCEL
Executed: 2016-05-30
SALVADOR ENTRADAS, JORGE HUMBERTO
Executed: 2016-05-30
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Optimization of a Lithographic Projection Apparatus Accounting for an Interlayer Characteristic