Patent Assignment
Reel/Frame 046953/0152
Assignment of Assignor's Interest
Recorded: 2018-09-24
Pages: 6
Assignors
SAWLANI, KAPIL
Executed: 2018-09-05
LIND, GARY B.
Executed: 2018-09-11
DANEK, MICHAL
Executed: 2018-09-11
POWELL, RONALD
Executed: 2018-09-05
RUMER, MICHAEL
Executed: 2018-09-21
ASHTIANI, KAIHAN
Executed: 2018-09-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
In-Situ Chamber Clean End Point Detection Systems and Methods Using Computer Vision Systems