Patent Assignment
Reel/Frame 046974/0855
Corrective Assignment to Correct the Spelling of the Second Inventor's Last Name Previously Recorded on Reel 046133 Frame 0167. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2018-08-29
Pages: 8
Assignors
KIRKPATRICK, SEAN R.
Executed: 2018-06-12
CHAU, KIET A.
Executed: 2018-06-12
CHAU, SON T.
Executed: 2018-06-12
Assignee
EXOGENESIS CORPORATION
20 FORTUNE DRIVE, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Enhanced High Aspect Ratio Etch Performance Using Accelerated Neutral Beams Derived from Gas-Cluster Ion Beams
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.