Patent Assignment
Reel/Frame 046979/0843
Assignment of Assignor's Interest
Recorded: 2018-09-26
Pages: 3
Assignors
HATANPAÄ, TIMO
Executed: 2018-08-15
VÄYRYNEN, KATJA
Executed: 2018-08-24
RITALA, MIKKO
Executed: 2018-08-24
LESKELÄ, MARKKU
Executed: 2018-08-30
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, 1322 AP, ALMERE, NETHERLANDS
Covered Property
(1)
Method of Forming a Transition Metal Containing Film on a Substrate by a Cyclical Deposition Process, a Method for Supplying a Transition Metal Halide Compound to a Reaction Chamber, and Related Vapor Deposition Apparatus