Patent Assignment
Reel/Frame 047027/0863
Assignment of Assignor's Interest
Recorded: 2018-09-06
Pages: 3
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Increased Isolation of Diffusion Breaks in Finfet Devices Using an Angled Etch