Patent Assignment
Reel/Frame 047041/0018
Assignment of Assignor's Interest
Recorded: 2018-10-02
Pages: 5
Assignors
KUIPER, STEFAN
Executed: 2018-09-06
VAN ZWET, ERWIN JOHN
Executed: 2018-09-05
BÄUMER, STEFAN MICHAEL BRUNO
Executed: 2018-09-06
SADEGHIAN MARNANI, HAMED
Executed: 2018-08-30
Assignee
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
ANNA VAN BUERENPLEIN 1, 'S-GRAVENHAGE, 2595 DA, NETHERLANDS
Covered Property
(1)
Method of Determining an Overlay Error, Manufacturing Method and System for Manufacturing of a Multilayer Semiconductor Device, and Semiconductor Device Manufactured Thereby