Patent Assignment
Reel/Frame 047107/0797
Assignment of Assignor's Interest
Recorded: 2018-10-09
Pages: 4
Assignors
LIU, LI-JUNG
Executed: 2017-08-08
TSAO, CHIH-PIN
Executed: 2017-08-08
SOONG, CHIA-WEI
Executed: 2017-08-08
CHEN, JYH-HUEI
Executed: 2017-08-10
WANG, SHU-HUI
Executed: 2017-08-08
CHANG, SHIH-HSUN
Executed: 2017-08-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Fluorine Contamination Control in Semiconductor Manufacturing Process