Patent Assignment
Reel/Frame 047120/0660
Assignment of Assignor's Interest
Recorded: 2018-10-10
Pages: 4
Assignor
HIGUCHI, RYUTA
Executed: 2018-10-10
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Measurement Circuit