Patent Assignment
Reel/Frame 047125/0649
Assignment of Assignor's Interest
Recorded: 2018-10-10
Pages: 3
Assignors
TOMURA, MAJU
Executed: 2018-08-24
KIHARA, YOSHIHIDE
Executed: 2018-09-11
HONDA, MASANOBU
Executed: 2018-09-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method