Patent Assignment
Reel/Frame 047135/0143
Assignment of Assignor's Interest
Recorded: 2018-10-11
Pages: 6
Assignors
BI, ZHENXING
Executed: 2018-09-24
CHENG, KANGGUO
Executed: 2018-09-24
XU, WENYU
Executed: 2018-09-24
MIAO, XIN
Executed: 2018-09-24
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Self-Aligned Fin Recesses in Nanosheet Field Effect Transistors