Patent Assignment
Reel/Frame 047137/0019
Assignment of Assignor's Interest
Recorded: 2018-10-11
Pages: 3
Assignors
HSUEH, WEN-CHANG
Executed: 2018-09-13
LEE, HUAN-LING
Executed: 2018-09-14
CHEN, CHIA-JEN
Executed: 2018-09-21
LEE, HSIN-CHANG
Executed: 2018-09-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Mask with Reduced Wafer Neighboring Effect and Method of Manufacturing the Same