Patent Assignment
Reel/Frame 047163/0815
Assignment of Assignor's Interest
Recorded: 2018-09-28
Pages: 5
Assignors
YOO, YONG MIN
Executed: 2017-02-16
SHON, JONG WON
Executed: 2017-02-16
CHOI, SEUNG WOO
Executed: 2017-02-16
KANG, DONG SEOK
Executed: 2017-02-16
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Substrate Supporting Plate, Thin Film Deposition Apparatus Including the Same, and Thin Film Deposition Method