Patent Assignment
Reel/Frame 047166/0493
Assignment of Assignor's Interest
Recorded: 2018-10-15
Pages: 8
Assignors
BABAYAN, ELAINA
Executed: 2018-08-24
WHITE, SARAH
Executed: 2018-08-24
VENUGOPAL, VIJAY
Executed: 2018-10-10
BAKKE, JONATHAN
Executed: 2018-08-28
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Controlling Precursors in Chemical Deposition Processes