Patent Assignment
Reel/Frame 047168/0649
Assignment of Assignor's Interest
Recorded: 2018-10-15
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Ultra-Localized and Plasma Uniformity Control in a Plasma Processing System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.