Patent Assignment
Reel/Frame 047168/0813
Assignment of Assignor's Interest
Recorded: 2018-10-15
Pages: 4
Assignors
TAPILY, KANDABARA N.
Executed: 2018-02-15
HAN, SANGCHEOL
Executed: 2018-02-15
CHAE, SOO DOO
Executed: 2018-02-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
METHOD OF FORMING A SELF-ALIGNED CONTACT USING SELECTIVE SiO2 DEPOSITION