Patent Assignment
Reel/Frame 047201/0076
Assignment of Assignor's Interest
Recorded: 2018-10-17
Pages: 5
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques, System and Apparatus for Selective Deposition of a Layer Using Angled Ions