Patent Assignment
Reel/Frame 047202/0080
Assignment of Assignor's Interest
Recorded: 2018-10-17
Pages: 4
Assignors
YANG, WENBING
Executed: 2018-10-01
TAN, SAMANTHA
Executed: 2018-10-01
MUKHERJEE, TAMAL
Executed: 2018-10-02
KANARIK, KEREN JACOBS
Executed: 2018-10-01
PAN, YANG
Executed: 2018-10-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
High Energy Atomic Layer Etching