Patent Assignment
Reel/Frame 047203/0834
Assignment of Assignor's Interest
Recorded: 2018-10-17
Pages: 5
Assignors
ZI, AN-REN
Executed: 2018-09-11
LIN, CHIN-HSIANG
Executed: 2018-09-11
CHANG, CHING-YU
Executed: 2018-09-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Forming Photoresist Pattern