Patent Assignment
Reel/Frame 047203/0876
Assignment of Assignor's Interest
Recorded: 2018-10-17
Pages: 3
Assignor
LIU, CHANYUAN
Executed: 2018-09-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Asymmetric Wafer Bow Compensation by Physical Vapor Deposition