Patent Assignment
Reel/Frame 047207/0982
Assignment of Assignor's Interest
Recorded: 2018-10-18
Pages: 4
Assignor
SHIBAZAKI, YUICHI
Executed: 2018-10-04
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Exposure Apparatus and Exposure Method, Lithography Method, and Device Manufacturing Method