Patent Assignment
Reel/Frame 047213/0096
Assignment of Assignor's Interest
Recorded: 2018-10-18
Pages: 3
Assignor
LANE, BARTON
Executed: 2018-07-10
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Resonant Structure for Electron Cyclotron Resonant (Ecr) Plasma Ionization